NPOL > Members > Device Fabrication

Device Fabrication
Clean Room
Producer :
Application : Manufacturing with a low level of environmental pollutants

Multispinner & Hot Plate
Producer : OPTO FINETECH
Application : Spin coating & Baking

Mask Aligner
Producer : SUSS MicroTec
Application : Phtolithography

Electron-beam Evaporator
Producer : Selcos
Application : Metal & oxide deposition, Oblique angle deposition

Electron-beam Evaporator
Producer : Korea Vaucum Tech
Application : Metal deposition

ALD (Atomic Layer Deposition)
Producer : SNTeK
Application : Oxide deposition

RTA (Rapid Thermal Annealing)
Producer : SNTeK
Application : Diffusion, Nitride, Silicide, Crystalization Densify, Implant quality control

Sputter
Producer : SNTeK
Application : Metal & oxide deposition

Furnace
Producer : Dae Heung Science
Application : Thermal annealing